This project investigated a Lorentz-force excited microstructure that can simultaneously detect multiple gradient magnetic field components. The structure enables the measurement of static and alternating magnetic field. Rapid prototyping technique and 3D-printing of aluminum and acrylic plastic was chosen to investigate the microstructure design before fabrication with traditional MEMS processes. A current conducting path onto the device enables Lorentz force excitation of deflectable masses. Hereby, a perpendicular magnetic field can be measured and a gradient field calculated, deducing accurate information of the field components at the sensor’s head. This miniaturised gradiometer is capable of detecting and differentiating between gradient fields, homogeneous fields and gradient fields superimposed with a homogeneous field by measuring the magnetic flux density simultaneously at two points in space.
Kahr, M.; Stifter, M.; Steiner, H.; Hortschitz, W.; Kovacs, G.; Kainz, A.; Schalko, J.; Keplinger, F. (2019). Dual Resonator MEMS Magnetic Field Gradiometer. Sensors (MDPI), 19(3): 493
Kahr, M.; Stifter, M.; Steiner, H.; Hortschitz, W.; Kovacs, G.; Kainz, A.; Schalko, J.; Keplinger, F. (2018). Characterisation of a Quadrupol Magnetic Field Configuration with a Lorentz Force based MOEMS Gradiometer . IEEE, Conference Proceedings IEEE Sensors2018
Kahr, M. (2017). Design and Characterisation of 3D-Printed Magnetic Field Sensors. Wien
Gradiometer with optical readout for real-time Quality Monitoring in the Steel Belt Industry
Accent Innovation Award 2018, TFZ Wiener Neustadt, Österreich, 12/10/2018
Design and Characterisation of 3D-Printed Magnetic Field Sensors (Lehrveranstaltung)
Defensio (Diplomarbeit), 17/11/2017