Electric Field Sensing - Elfis

Electric Field Sensing

Summary for public relations purposes

Within the project, which was co-founded by the Government of Lower-Austria, a new way of passive electric field transduction was developed that hardly distorts the electric field to be measured. The successful approach is based on microsystem technology and exploits electric field induced mechanical deflections in conjunction with a very sensitive optical readout. Since the electrostatic forces responsible for the deflections are extremely weak (in the order of Piconewtons and even smaller), both the actual transducer and the optical readout needed to be built to a level of cutting-edge sophistication.
The requirement for distortion-free measurement was met by the new transduction not depending an electrical power supply or any grounded connection. Dielectric optical waveguides were used as the only interconnection between sensing head and electronics. Due to the simplicity of the integrated optical readout with a micro-shutter which is capable of resolving tiny deflections in the sub-picometer regime, there is no need for expensive, complicated components such as coherent light sources, optical couplers or beam splitters. The resulting rod-like probe with the transducer on its far end allows for almost point-like measurement of the electrical field strength with almost negligible distortions of the electric field.
As an example to showcase the capability of the probe, highly precise, point-like mappings of the field of an electrostatic quadrupole were carried out within the project. These measurements were performed on one of the ELENA ring’s quadrupole focusing elements at CERN, where there exists an unsatisfied need for instrumentation for quality control and optimisation of their electrostatic components.
The findings of the project resulted in a new method of measuring the electric field. The unique properties of this method enable new types of measurements which are not viable with state-of-the-art systems. This will induce progress in numerous scientific and technological fields as diverse as lightning and atmospheric research, environmental and physiological impacts of high-voltage AC and DC infrastructure and autonomous navigation. The corresponding results bear the possibility for paradigm shifts within the respective fields.

 

Details

Duration 01/04/2016 - 30/11/2019
Funding FWF
Program FWF
Department

Department for Integrated Sensor Systems

Center for Micro and Nano Sensors

Principle investigator for the project (Danube University Krems) Dipl.-Ing. Dr. Wilfried Hortschitz
Project members Gabor Kovacs, BSc Dipl.-Ing. Dr. Harald Steiner

Publications

Kainz, A.; Keplinger, F.; Hortschitz, W.; Kahr, M.; Steiner, H.; Stifter, M.; Hunt, J. R.; Resta-Lopez, J.; Rodin, V.; Welsch, C. P.; Borburgh, J.; Fraser, M. A.; Bartmann, W. (2019). Noninvasive 3D Field Mapping of Complex Static Electric Fields. PHYSICAL REVIEW LETTERS, Vol. 122: 244801

Kainz, A.; Steiner, H.; Hortschitz, W.; Schalko, J.; Jachimowicz, A.; Keplinger, F. (2019). Improved Reference-Free Vibration-Suppressed Optical MEMS Electric Field Strength Sensor. In: IEEE, proceedings 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII): 2114-2117, IEEE, Deutschland

Hortschitz, W.; Kainz, A.; Kovacs, G.; Steiner, H.; Stifter, M.; Sauter, T.; Schalko, J.; Jachimowicz, A.; Keplinger, F. (2018). Robust, ultra sensitive MOEMS inertial sensor read out with infrared light. 2018 IEEE Micro Electro Mechanical Systems (MEMS), Vol. 1: 952-955

Kainz, A.; Hortschitz, W.; Steiner, H.; Stifter, M.; Schalko, J.; Jachimowicz, A.; Keplinger, F. (2018). Passive optomechanical electric field strength sensor with built-in vibration suppression. Applied Physics Letters, Vol. 113, iss. 14: 143505

Hammer, G.; Kainz, A.; Hortschitz, W.; Zan, H. W.; Meng, H. F.; Sauter, T.; Keplinger, F. (2018). Detection of Heart and Respiration Rate with an Organic-Semiconductor-Based Optomechanical MEMS Sensor. Proceedings Eurosensors 2018, Vol. 2, iss. 13: 715

Hortschitz, W.; Kainz, A.; Steiner, H.; Kovacs, G.; Stifter, M.; Kahr, M.; Schalko, J.; Keplinger, F. (2018). Characterization of a Micro-Opto-Mechanical Transducer for the Electric Field Strength. Proceedings Eurosensors 2018, Vol. 2, iss. 13: 855

Kahr, M.; Domke, M.; Steiner, H.; Hortschitz, W.; Stifter, M. (2018). Borosilicate Glass MEMS Lorentz Force Magnetometer. Proceedings Eurosensors 2018, Vol. 2, iss. 13: 788

Kahr, M.; Hortschitz, W.; Steiner, H.; Stifter, M.; Kainz, A.; Keplinger, F. (2018). Novel 3D-Printed MEMS Magnetometer with Optical Detection. Proceedings Eurosensors 2018, Vol. 2, iss. 13: 783

Kahr, M.; Stifter, M.; Steiner, H.; Hortschitz, W.; Kovacs, G.; Kainz, A.; Schalko, J.; Keplinger, F. (2018). Responsitivity Measurement of a Lorentz Force Transducer for Homogeneous and Inhomogeneous Magnetic Fields. Proceedings Eurosensors 2018, Vol. 2, iss. 13: 843

Kainz, A.; Hortschitz, W.; Steiner, H.; Stifter, M.; Keplinger, F. (2018). Equivalent Circuit Model of an Optomechanical MEMS Electric Field Strength Sensor. Proceedings Eurosensors 2018, Vol. 2, iss. 13: 712

Steiner, H.; Kainz, A.; Stifter, M.; Kahr, M.; Kovacs, G.; Keplinger, F.; Hortschitz, W. (2018). Cross-Sensitivity of an Optomechanical MEMS Transducer. Proceedings Eurosensors 2018, Vol. 2, iss. 13: 719

Kainz, A.; Steiner, H.; Schalko, J.; Jachimowicz, A.; Kohl, F.; Stifter, M.; Beigelbeck, R.; Keplinger, F.; Hortschitz, W. (2018). Distortion-free measurement of electric field strength with a MEMS sensor. Nature Electronics, 1: 68-73

Lectures

Improved Reference-Free Vibration-Suppressed Optical MEMS Electric Field Strength Sensor

20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin, (D), 25/06/2019

3D-Printed MEMS Magnetometer Featuring Compliant Mechanism

Eurosensors 2018, Graz, Österreich, 10/09/2018

Borosilicate Glass MEMS Lorentz Force Magnetometer

Eurosensors 2018, Graz, Österreich, 10/09/2018

Cross-Sensitivity of an Optomechanical MEMS Transducer

Eurosensors 2018, Graz, Österreich, 10/09/2018

MOEMS Based Single Chip Lorentz Force Magnetic Gradiometer

Eurosensors 2018, Graz, Österreich, 10/09/2018

Novel 3D-Printed MEMS Magnetometer with Optical Detection

Eurosensors 2018, Graz, Österreich, 10/09/2018

Responsitivity Measurement of a Lorentz Force Transducer for Homogeneous and Inhomogeneous Magnetic Fields

Eurosensors 2018, Graz, Österreich, 10/09/2018

Robust, ultra sensitive MOEMS inertial sensor read out with infrared light

2018 IEEE Micro Electro Mechanical Systems (MEMS), Belfast, Irland, 23/01/2018

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