By integrating micro-mechanical, electrical and optical systems into hybrid microsystems, unique characteristics regarding resolution limits, dynamic ranges and sensitivities of sensors can be achieved.

Currently, one research focus is on optical MEMS (Micro-Electro-Mechanical Systems). In this field, DISS has developed a transducer principle that can be used to measure displacements, vibrations and accelerations. The principle is based on the modulation of a light flux through a microsystem. Using low-cost optoelectronic components, laboratory samples have been developed that can detect deflections of a few µm with resolutions of sub pm/√Hz (equivalent to sub μg/√Hz for accelerations).

The envisioned applications range from integrated acoustic accelerometers for medical purposes, to recording seismic activity, to position determination without a reference system. The research priorities for further development are:

  • the investigation of the resolution limits with respect to differential deflection of the components
  • the implementation of special transmission characteristics by the design of the modulator apertures
  • the transfer of the transducer principle to new sensor applications
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