Next generation heterointegration of ion sliced lithium niobate nanofilms enabled by novel characterization tools

Next generation heterointegration of ion-sliced lithium niobate nanofilms enabled by novel characterization tools

The project “H-iSlice” is dedicated to advanced research on ion-slicing heterointegration of monocrystalline Lithium Niobate (LNO) nanofilms onto silicon substrates. The influence of various production process parameters on the reliability, stability, and reproducibility as well as on the attainable piezoelectric and thermal material parameters of the LNO nanofilms will be studied extensively. For measuring the piezoelectric and thermal material parameters in a fast and accurate way, a novel AFSEMTM-based platform (a combination of an atomic force microscope and a scanning electron microscope), custom-tailored microprobes, and in situ characterization methods will be devised. The all-embracing goal of the project “H-iSlice” is the fabrication of Si-supported functionalized LNO nanofilms with tailored crystal cuts that are characterized by a high degree of crystallinity, outstanding piezoelectric coefficients, and well-determined thermal properties in order to pave the way for completely new fields of application.


Duration 01/01/2019 - 30/06/2021
Funding FFG
Program FFG

Department for Integrated Sensor Systems

Center for Distributed Systems and Sensor Networks

Principle investigator for the project (Danube University Krems) Priv.-Doz.Dipl.-Ing.Dr. Thilo Sauter


Kainz, A.; Beigelbeck, R.; Schmid, S. (2021). Modeling the Electrostatic Actuation of Nanomechanical Pillar Dimers. frontiers in Mechanical Engineering, online: 4/4, frontiers

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